events
June 7-11, 2010
E-MRS 2010 spring
Technical sessions:
June 7-11
Exhibit:
June 8-10
Congress Center, Strasbourg, France
Aug. 29-Sept. 2, 2010
The 8th European Conference on Silicon Carbide and Related Materials
Oslo, Norway
polishing and surface preparation
Improve yields and device performance
(from as-cut or on commercial wafers for wafer manufacturers or users)
Surface quality
* with atomic steps
** measured by AFM, field size 5µm x 5µm in tapping mode
