events
June 7-11, 2010
E-MRS 2010 spring
Technical sessions:
June 7-11
Exhibit:
June 8-10
Congress Center, Strasbourg, France
Aug. 29-Sept. 2, 2010
The 8th European Conference on Silicon Carbide and Related Materials
Oslo, Norway
planarization
Polishing with low removal after device fabrication or annealing to improve surface morphology. Removal thickness as little as 1000Å.




